Exploring the high pressure SEM

نویسندگان

  • C. Mathieu
  • L Khouchaf
  • A Kadoun
چکیده

The high pressure SEM (HPSEM) is an important tool for materials characterisation. The presence of a gaseous atmosphere inside the specimen chamber permits to limit the charging effect and to obtain image with specific electron detector. The electron beam scattering due to the introduction of the gas within the specimen chamber of the HP-SEM influences the image quality and the microanalysis results. This paper describes the different electron detectors, the specific contrast in high-pressure conditions for nonconductive specimen and to interpret the x-ray microanalysis results.

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تاریخ انتشار 2007